Smart Systems for Material and Process Designing in Direct Nanoimprint Lithography Using Hybrid Deep Learning

A hybrid smart process and material design system for nanoimprinting is proposed, which is combined with a learning system based on experimental and numerical simulation results. Instead of carrying out extensive learning experiments for various conditions, the simulation learning results are partia...

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Detalles Bibliográficos
Autores principales: Hirai, Yoshihiko, Tsukamoto, Sou, Tanabe, Hidekatsu, Kameyama, Kai, Kawata, Hiroaki, Yasuda, Masaaki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9370332/
https://www.ncbi.nlm.nih.gov/pubmed/35957005
http://dx.doi.org/10.3390/nano12152571

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9370332/
https://www.ncbi.nlm.nih.gov/pubmed/35957005
http://dx.doi.org/10.3390/nano12152571

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