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Smart Systems for Material and Process Designing in Direct Nanoimprint Lithography Using Hybrid Deep Learning
A hybrid smart process and material design system for nanoimprinting is proposed, which is combined with a learning system based on experimental and numerical simulation results. Instead of carrying out extensive learning experiments for various conditions, the simulation learning results are partia...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9370332/ https://www.ncbi.nlm.nih.gov/pubmed/35957005 http://dx.doi.org/10.3390/nano12152571 |