Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition

The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h(31,f). With applied DC biases (up to 15 V) on...

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Detalles Bibliográficos
Autores principales: Cheng, Christopher, Peters, Travis, Dangi, Ajay, Agrawal, Sumit, Chen, Haoyang, Kothapalli, Sri-Rajasekhar, Trolier-McKinstry, Susan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9370952/
https://www.ncbi.nlm.nih.gov/pubmed/35957175
http://dx.doi.org/10.3390/s22155614

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9370952/
https://www.ncbi.nlm.nih.gov/pubmed/35957175
http://dx.doi.org/10.3390/s22155614

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