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A High-Sensitivity Gravimetric Biosensor Based on S(1) Mode Lamb Wave Resonator
The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S(1) mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonat...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9371384/ https://www.ncbi.nlm.nih.gov/pubmed/35957469 http://dx.doi.org/10.3390/s22155912 |