A High-Sensitivity Gravimetric Biosensor Based on S(1) Mode Lamb Wave Resonator

The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S(1) mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonat...

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Detalles Bibliográficos
Autores principales: Luo, Tiancheng, Liu, Wenjuan, Wen, Zhiwei, Xie, Ying, Tong, Xin, Cai, Yao, Liu, Yan, Sun, Chengliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9371384/
https://www.ncbi.nlm.nih.gov/pubmed/35957469
http://dx.doi.org/10.3390/s22155912
Descripción
Sumario:The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S(1) mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonators, based on a 400-nm X-cut lithium niobate film, showed a resonance frequency over 8 GHz. Moreover, a PMMA layer was used as the mass-sensing layer, to study the performance of the biosensors based on HF-LWRs. Through optimizing the thickness of the lithium niobate film and the electrode configuration, the mass sensitivity of the biosensor could reach up to 74,000 Hz/(ng/cm(2)), and the maximum value of figure of merit (FOM) was 5.52 × 10(7), which shows great potential for pushing the performance boundaries of gravimetric-sensitive acoustic biosensors.

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