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An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure
Vision-based precision measurement is limited by the optical resolution. Although various super-resolution algorithms have been developed, measurement precision and accuracy are difficult to guarantee. To achieve nanoscale resolution measurement, a super-resolution microstructure concept is proposed...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9372069/ https://www.ncbi.nlm.nih.gov/pubmed/35953698 http://dx.doi.org/10.1038/s41598-022-17209-9 |