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An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure

Vision-based precision measurement is limited by the optical resolution. Although various super-resolution algorithms have been developed, measurement precision and accuracy are difficult to guarantee. To achieve nanoscale resolution measurement, a super-resolution microstructure concept is proposed...

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Detalles Bibliográficos
Autores principales: Fu, Wenpeng, Zhao, Chenyang, Xue, Wen, Li, Changlin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9372069/
https://www.ncbi.nlm.nih.gov/pubmed/35953698
http://dx.doi.org/10.1038/s41598-022-17209-9