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Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography

Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabricati...

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Detalles Bibliográficos
Autores principales: Khaidarov, Egor, Eschimese, Damien, Lai, Keng Heng, Huang, Aihong, Fu, Yuan Hsing, Lin, Qunying, Paniagua-Dominguez, Ramon, Kuznetsov, Arseniy I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9388524/
https://www.ncbi.nlm.nih.gov/pubmed/35982212
http://dx.doi.org/10.1038/s41598-022-18259-9