Cargando…

Compensation of the Stress Gradient in Physical Vapor Deposited Al(1−x)Sc(x)N Films for Microelectromechanical Systems with Low Out-of-Plane Bending

Thin film through-thickness stress gradients produce out-of-plane bending in released microelectromechanical systems (MEMS) structures. We study the stress and stress gradient of Al(0.68)Sc(0.32)N thin films deposited directly on Si. We show that Al(0.68)Sc(0.32)N cantilever structures realized in f...

Descripción completa

Detalles Bibliográficos
Autores principales:	Beaucejour, Rossiny, D’Agati, Michael, Kalyan, Kritank, Olsson, Roy H.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9394260/ https://www.ncbi.nlm.nih.gov/pubmed/35893167 http://dx.doi.org/10.3390/mi13081169

Ejemplares similares

High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer
por: Mion, Thomas, et al.
Publicado: (2023)

Fabrication of In(x)Ga(1−x)N Nanowires on Tantalum Substrates by Vapor-Liquid-Solid Chemical Vapor Deposition
por: Hu, Yan-Ling, et al.
Publicado: (2018)

Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer
por: Liu, Guowen, et al.
Publicado: (2023)

Development the method of pipeline bending strain measurement based on microelectromechanical systems inertial measurement unit
por: Li, Rui, et al.
Publicado: (2020)

Chemical vapor deposition of germanium-rich CrGe(x) nanowires
por: Dřínek, Vladislav, et al.
Publicado: (2021)

Mechanics of microelectromechanical systems
por: Lobontiu, Nicolae, et al.
Publicado: (2005)

Chemical Vapor Deposition of Monolayer Mo(1−x)W(x)S(2) Crystals with Tunable Band Gaps
por: Wang, Ziqian, et al.
Publicado: (2016)

Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope
por: Nieminen, Tarmo, et al.
Publicado: (2023)

Synthesis of 2D MoS(2(1−x))Se(2x) semiconductor alloy by chemical vapor deposition
por: Yao, Wenwen, et al.
Publicado: (2020)

Microelectromechanical reprogrammable logic device
por: Hafiz, M. A. A., et al.
Publicado: (2016)

Electrostrictive microelectromechanical fibres and textiles
por: Khudiyev, Tural, et al.
Publicado: (2017)

Molecule-based microelectromechanical sensors
por: Urdampilleta, Matias, et al.
Publicado: (2018)

Stability of SiN(x) Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature
por: Zhang, Chi, et al.
Publicado: (2021)

Metalorganic chemical vapor deposition growth of InAs/GaSb type II superlattices with controllable As(x)Sb(1-x )interfaces
por: Li, Li-Gong, et al.
Publicado: (2012)

Microelectromechanical Systems (MEMS) for Biomedical Applications
por: Chircov, Cristina, et al.
Publicado: (2022)

Vapor deposition
por: Blocher, John Milton, et al.
Publicado: (1966)

SC experiments and beams : a bending magnet
por: CERN PhotoLab
Publicado: (1958)

Observing ice structure of micron-sized vapor-deposited ice with an x-ray free-electron laser
por: Kim, Seonmyeong, et al.
Publicado: (2023)

Optical and Structural Property Tuning in Physical Vapor Deposited Bismuth Halides Cs(3)Bi(2)(I(1–x)Br(x))(9) (0 ≤ x ≤ 1)
por: Bonomi, Sara, et al.
Publicado: (2021)

New SC Algorithm for MAD-X
por: Schmidt, Frank, et al.
Publicado: (2018)

Vertical and Lateral Etch Survey of Ferroelectric AlN/Al(1−x)Sc(x)N in Aqueous KOH Solutions
por: Tang, Zichen, et al.
Publicado: (2022)

Atypical Infection-Related Glomerulonephritis With “Masked” IgG-Kappa Crystalline Hump-Like Deposits
por: DiFranza, Lanny T., et al.
Publicado: (2020)

Microelectromechanically tunable multiband metamaterial with preserved isotropy
por: Pitchappa, Prakash, et al.
Publicado: (2015)

Electrical Characterization of Microelectromechanical Silicon Carbide Resonators
por: Chang, Wen-Teng, et al.
Publicado: (2008)

Microelectromechanical Systems Based on Magnetic Polymer Films
por: Ficai, Denisa, et al.
Publicado: (2022)

Concepts and Key Technologies of Microelectromechanical Systems Resonators
por: Feng, Tianren, et al.
Publicado: (2022)

Terahertz Detectors Using Microelectromechanical System Resonators
por: Li, Chao, et al.
Publicado: (2023)

Role of Co-Vapors in Vapor Deposition Polymerization
por: Lee, Ji Eun, et al.
Publicado: (2015)

Mechanisms of X Chromosome Dosage Compensation
por: Ercan, Sevinç
Publicado: (2015)

Determination of the surface band bending in In(x)Ga(1−x)N films by hard x-ray photoemission spectroscopy
por: Lozac'h, Mickael, et al.
Publicado: (2013)

X-ray interference fringes from a weakly bent plane-parallel crystal with negative strain gradient
por: Fukamachi, Tomoe, et al.
Publicado: (2019)

scX: A user-friendly tool for scRNA-seq exploration
por: Waichman, Tomás Vega, et al.
Publicado: (2023)

Al(1−x)Sc(x)N Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
por: Wolff, Niklas, et al.
Publicado: (2022)

Vapor-plating: the formation of coatings by vapor-deposition techniques
por: Powell, Carroll Fredlock, et al.
Publicado: (1955)

The incredible shrinking bee: insects as models for microelectromechanical devices
por: Lawry, James V
Publicado: (2006)

Microelectromechanical Maltese-cross metamaterial with tunable terahertz anisotropy
por: Zhu, W.M., et al.
Publicado: (2012)

Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
por: Zhang, Jing, et al.
Publicado: (2015)

Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
por: Ortigoza-Diaz, Jessica, et al.
Publicado: (2018)

Fundamental Study for a Graphite-Based Microelectromechanical System
por: Sone, Junji, et al.
Publicado: (2018)

Microelectromechanical Transducer to Monitor High-Doses of Nuclear Irradiation
por: Philippe, Julien, et al.
Publicado: (2021)

Cannot write session to /tmp/vufind_sessions/sess_3bctijcme2svp8e829jrslhh5t