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Design, Fabrication, Structure Optimization and Pressure Sensing Demonstration of COC Piezoelectret Sensor and Sensor Array

This study reported on the design and fabrication of a pseudo-piezoelectric material (piezoelectret) from cyclic olefin copolymer (COC) based on a micropillar structure. The fabrication feasibility of such structure was explored and piezoelectret with the good piezoelectric activity (characterized b...

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Detalles Bibliográficos
Autores principales: Wang, Hui, Wang, Xiaolin, Wadsworth, Matthew, Ahmed, Mohammad Faisal, Liu, Zhe, Zeng, Changchun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9394335/
https://www.ncbi.nlm.nih.gov/pubmed/35893175
http://dx.doi.org/10.3390/mi13081177