Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry

[Image: see text] Two-dimensional transition metal dichalcogenides, such as MoS(2), are intensely studied for applications in electronics. However, the difficulty of depositing large-area films of sufficient quality under application-relevant conditions remains a major challenge. Herein, we demonstr...

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Detalles Bibliográficos
Autores principales: Mattinen, Miika, Gity, Farzan, Coleman, Emma, Vonk, Joris F. A., Verheijen, Marcel A., Duffy, Ray, Kessels, Wilhelmus M. M., Bol, Ageeth A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9404538/
https://www.ncbi.nlm.nih.gov/pubmed/36032554
http://dx.doi.org/10.1021/acs.chemmater.2c01154

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9404538/
https://www.ncbi.nlm.nih.gov/pubmed/36032554
http://dx.doi.org/10.1021/acs.chemmater.2c01154

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