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Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry
[Image: see text] Two-dimensional transition metal dichalcogenides, such as MoS(2), are intensely studied for applications in electronics. However, the difficulty of depositing large-area films of sufficient quality under application-relevant conditions remains a major challenge. Herein, we demonstr...
Autores principales: | Mattinen, Miika, Gity, Farzan, Coleman, Emma, Vonk, Joris F. A., Verheijen, Marcel A., Duffy, Ray, Kessels, Wilhelmus M. M., Bol, Ageeth A. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9404538/ https://www.ncbi.nlm.nih.gov/pubmed/36032554 http://dx.doi.org/10.1021/acs.chemmater.2c01154 |
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