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Al(1−x)Sc(x)N Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
Ferroelectric thin films of wurtzite-type aluminum scandium nitride (Al(1−x)Sc(x)N) are promising candidates for non-volatile memory applications and high-temperature sensors due to their outstanding functional and thermal stability exceeding most other ferroelectric thin film materials. In this wor...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9412885/ https://www.ncbi.nlm.nih.gov/pubmed/36014204 http://dx.doi.org/10.3390/mi13081282 |