Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath

As the importance of ion-assisted surface processing based on low-temperature plasma increases, the monitoring of ion energy impinging into wafer surfaces becomes important. Monitoring methods that are noninvasive, real-time, and comprise ion collision in the sheath have received much research atten...

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Detalles Bibliográficos
Autores principales: Seong, Inho, Kim, Sijun, Lee, Youngseok, Cho, Chulhee, Lee, Jangjae, Jeong, Wonnyoung, You, Yebin, You, Shinjae
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9413131/
https://www.ncbi.nlm.nih.gov/pubmed/36016029
http://dx.doi.org/10.3390/s22166254

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9413131/
https://www.ncbi.nlm.nih.gov/pubmed/36016029
http://dx.doi.org/10.3390/s22166254

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