Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing su...

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Detalles Bibliográficos
Autores principales: Morkvenaite-Vilkonciene, Inga, Bucinskas, Vytautas, Subaciute-Zemaitiene, Jurga, Sutinys, Ernestas, Virzonis, Darius, Dzedzickis, Andrius
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414043/
https://www.ncbi.nlm.nih.gov/pubmed/36014178
http://dx.doi.org/10.3390/mi13081256

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414043/
https://www.ncbi.nlm.nih.gov/pubmed/36014178
http://dx.doi.org/10.3390/mi13081256

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