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Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing su...

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Detalles Bibliográficos
Autores principales: Morkvenaite-Vilkonciene, Inga, Bucinskas, Vytautas, Subaciute-Zemaitiene, Jurga, Sutinys, Ernestas, Virzonis, Darius, Dzedzickis, Andrius
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414043/
https://www.ncbi.nlm.nih.gov/pubmed/36014178
http://dx.doi.org/10.3390/mi13081256
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author Morkvenaite-Vilkonciene, Inga
Bucinskas, Vytautas
Subaciute-Zemaitiene, Jurga
Sutinys, Ernestas
Virzonis, Darius
Dzedzickis, Andrius
author_facet Morkvenaite-Vilkonciene, Inga
Bucinskas, Vytautas
Subaciute-Zemaitiene, Jurga
Sutinys, Ernestas
Virzonis, Darius
Dzedzickis, Andrius
author_sort Morkvenaite-Vilkonciene, Inga
collection PubMed
description The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.
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spelling pubmed-94140432022-08-27 Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications Morkvenaite-Vilkonciene, Inga Bucinskas, Vytautas Subaciute-Zemaitiene, Jurga Sutinys, Ernestas Virzonis, Darius Dzedzickis, Andrius Micromachines (Basel) Review The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references. MDPI 2022-08-04 /pmc/articles/PMC9414043/ /pubmed/36014178 http://dx.doi.org/10.3390/mi13081256 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Morkvenaite-Vilkonciene, Inga
Bucinskas, Vytautas
Subaciute-Zemaitiene, Jurga
Sutinys, Ernestas
Virzonis, Darius
Dzedzickis, Andrius
Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_full Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_fullStr Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_full_unstemmed Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_short Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
title_sort development of electrostatic microactuators: 5-year progress in modeling, design, and applications
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414043/
https://www.ncbi.nlm.nih.gov/pubmed/36014178
http://dx.doi.org/10.3390/mi13081256
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