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Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications
The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing su...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414043/ https://www.ncbi.nlm.nih.gov/pubmed/36014178 http://dx.doi.org/10.3390/mi13081256 |