Evolution in Lithography Techniques: Microlithography to Nanolithography

In this era, electronic devices such as mobile phones, computers, laptops, sensors, and many more have become a necessity in healthcare, for a pleasant lifestyle, and for carrying out tasks quickly and easily. Different types of temperature sensors, biosensors, photosensors, etc., have been develope...

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Detalles Bibliográficos
Autores principales: Sharma, Ekta, Rathi, Reena, Misharwal, Jaya, Sinhmar, Bhavya, Kumari, Suman, Dalal, Jasvir, Kumar, Anand
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414268/
https://www.ncbi.nlm.nih.gov/pubmed/36014619
http://dx.doi.org/10.3390/nano12162754

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414268/
https://www.ncbi.nlm.nih.gov/pubmed/36014619
http://dx.doi.org/10.3390/nano12162754

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