Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer

At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure,...

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Detalles Bibliográficos
Autores principales: Li, Chen, Zhang, Chi, Yang, Lijun, Guo, Fangtong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414920/
https://www.ncbi.nlm.nih.gov/pubmed/36014243
http://dx.doi.org/10.3390/mi13081321

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414920/
https://www.ncbi.nlm.nih.gov/pubmed/36014243
http://dx.doi.org/10.3390/mi13081321

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