Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer

At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure,...

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Detalles Bibliográficos
Autores principales: Li, Chen, Zhang, Chi, Yang, Lijun, Guo, Fangtong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414920/
https://www.ncbi.nlm.nih.gov/pubmed/36014243
http://dx.doi.org/10.3390/mi13081321
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author Li, Chen
Zhang, Chi
Yang, Lijun
Guo, Fangtong
author_facet Li, Chen
Zhang, Chi
Yang, Lijun
Guo, Fangtong
author_sort Li, Chen
collection PubMed
description At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × 10(−3) W/kPa and the linearity was 5.9 × 10(−3). The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field.
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spelling pubmed-94149202022-08-27 Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer Li, Chen Zhang, Chi Yang, Lijun Guo, Fangtong Micromachines (Basel) Article At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × 10(−3) W/kPa and the linearity was 5.9 × 10(−3). The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field. MDPI 2022-08-15 /pmc/articles/PMC9414920/ /pubmed/36014243 http://dx.doi.org/10.3390/mi13081321 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Li, Chen
Zhang, Chi
Yang, Lijun
Guo, Fangtong
Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
title Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
title_full Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
title_fullStr Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
title_full_unstemmed Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
title_short Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
title_sort silicon-on-insulator optical waveguide pressure sensor based on mach-zehnder interferometer
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414920/
https://www.ncbi.nlm.nih.gov/pubmed/36014243
http://dx.doi.org/10.3390/mi13081321
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AT guofangtong silicononinsulatoropticalwaveguidepressuresensorbasedonmachzehnderinterferometer

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