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Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure,...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414920/ https://www.ncbi.nlm.nih.gov/pubmed/36014243 http://dx.doi.org/10.3390/mi13081321 |