Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators

This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating silicon plate resonators with an area of 5 × 1 mm(...

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Detalles Bibliográficos
Autores principales: Ruiz-Díez, Víctor, Ababneh, Abdallah, Seidel, Helmut, Sánchez-Rojas, José Luis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415132/
https://www.ncbi.nlm.nih.gov/pubmed/36014124
http://dx.doi.org/10.3390/mi13081202

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415132/
https://www.ncbi.nlm.nih.gov/pubmed/36014124
http://dx.doi.org/10.3390/mi13081202

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