Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration

The paper deals with cantilevers made from monocrystalline silicon by processes of microtechnology. The cantilevers are passive structures and have no transducers. The application as a material measure for the inspection of stylus forces is in the center of investigations. A simple method is the mea...

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Detalles Bibliográficos
Autores principales: Frühauf, Joachim, Gärtner, Eva, Li, Zhi, Doering, Lutz, Spichtinger, Jan, Ehret, Gerd
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415165/
https://www.ncbi.nlm.nih.gov/pubmed/36016013
http://dx.doi.org/10.3390/s22166253

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415165/
https://www.ncbi.nlm.nih.gov/pubmed/36016013
http://dx.doi.org/10.3390/s22166253

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