Cargando…
Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration
The paper deals with cantilevers made from monocrystalline silicon by processes of microtechnology. The cantilevers are passive structures and have no transducers. The application as a material measure for the inspection of stylus forces is in the center of investigations. A simple method is the mea...
Autores principales: | , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415165/ https://www.ncbi.nlm.nih.gov/pubmed/36016013 http://dx.doi.org/10.3390/s22166253 |
_version_ | 1784776164732043264 |
---|---|
author | Frühauf, Joachim Gärtner, Eva Li, Zhi Doering, Lutz Spichtinger, Jan Ehret, Gerd |
author_facet | Frühauf, Joachim Gärtner, Eva Li, Zhi Doering, Lutz Spichtinger, Jan Ehret, Gerd |
author_sort | Frühauf, Joachim |
collection | PubMed |
description | The paper deals with cantilevers made from monocrystalline silicon by processes of microtechnology. The cantilevers are passive structures and have no transducers. The application as a material measure for the inspection of stylus forces is in the center of investigations. A simple method is the measurement of the deflection of the cantilever at the position of load by the force if the stiffness of the cantilever at this position is known. Measurements of force–deflection characteristics are described and discussed in context with the classical theory of elastic bending. The methods of determining the stiffness are discussed together with results. Finally, other methods based on tactile measurements along the cantilever are described and tested. The paper discusses comprehensively the properties of concrete silicon chips with cantilevers to underpin its applicability in industrial metrology. The progress consists of the estimation of the accuracy of the proposed method of stylus force measurement and the extraction of information from a tactile measured profile along the silicon cantilever. Furthermore, improvements are proposed for approaches to an ideal cantilever. |
format | Online Article Text |
id | pubmed-9415165 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-94151652022-08-27 Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration Frühauf, Joachim Gärtner, Eva Li, Zhi Doering, Lutz Spichtinger, Jan Ehret, Gerd Sensors (Basel) Article The paper deals with cantilevers made from monocrystalline silicon by processes of microtechnology. The cantilevers are passive structures and have no transducers. The application as a material measure for the inspection of stylus forces is in the center of investigations. A simple method is the measurement of the deflection of the cantilever at the position of load by the force if the stiffness of the cantilever at this position is known. Measurements of force–deflection characteristics are described and discussed in context with the classical theory of elastic bending. The methods of determining the stiffness are discussed together with results. Finally, other methods based on tactile measurements along the cantilever are described and tested. The paper discusses comprehensively the properties of concrete silicon chips with cantilevers to underpin its applicability in industrial metrology. The progress consists of the estimation of the accuracy of the proposed method of stylus force measurement and the extraction of information from a tactile measured profile along the silicon cantilever. Furthermore, improvements are proposed for approaches to an ideal cantilever. MDPI 2022-08-19 /pmc/articles/PMC9415165/ /pubmed/36016013 http://dx.doi.org/10.3390/s22166253 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Frühauf, Joachim Gärtner, Eva Li, Zhi Doering, Lutz Spichtinger, Jan Ehret, Gerd Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration |
title | Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration |
title_full | Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration |
title_fullStr | Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration |
title_full_unstemmed | Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration |
title_short | Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration |
title_sort | silicon cantilever for micro/nanoforce and stiffness calibration |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415165/ https://www.ncbi.nlm.nih.gov/pubmed/36016013 http://dx.doi.org/10.3390/s22166253 |
work_keys_str_mv | AT fruhaufjoachim siliconcantileverformicronanoforceandstiffnesscalibration AT gartnereva siliconcantileverformicronanoforceandstiffnesscalibration AT lizhi siliconcantileverformicronanoforceandstiffnesscalibration AT doeringlutz siliconcantileverformicronanoforceandstiffnesscalibration AT spichtingerjan siliconcantileverformicronanoforceandstiffnesscalibration AT ehretgerd siliconcantileverformicronanoforceandstiffnesscalibration |