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Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration
The paper deals with cantilevers made from monocrystalline silicon by processes of microtechnology. The cantilevers are passive structures and have no transducers. The application as a material measure for the inspection of stylus forces is in the center of investigations. A simple method is the mea...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415165/ https://www.ncbi.nlm.nih.gov/pubmed/36016013 http://dx.doi.org/10.3390/s22166253 |