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Enhanced Electrical Properties of Copper Nitride Films Deposited via High Power Impulse Magnetron Sputtering
High Power Impulse Magnetron Sputtering (HiPIMS) has generated a great deal of interest by offering significant advantages such as high target ionization rate, high plasma density, and the smooth surface of the sputtered films. This study discusses the deposition of copper nitride thin films via HiP...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415204/ https://www.ncbi.nlm.nih.gov/pubmed/36014680 http://dx.doi.org/10.3390/nano12162814 |