Q-Factor Enhancement of Coupling Bragg and Local Resonance Band Gaps in Single-Phase Phononic Crystals for TPOS MEMS Resonator

This paper presents a type of single-phase double “I” hole phononic crystal (DIH-PnC) structure, which is formed by vertically intersecting double “I” holes. By using the finite element method, the complex energy band curve, special point mode shapes, and different delay lines were calculated. Numer...

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Detalles Bibliográficos
Autores principales: Li, Lixia, He, Weitao, Tong, Zhixue, Liu, Haixia, Xie, Miaoxia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415325/
https://www.ncbi.nlm.nih.gov/pubmed/36014140
http://dx.doi.org/10.3390/mi13081217

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415325/
https://www.ncbi.nlm.nih.gov/pubmed/36014140
http://dx.doi.org/10.3390/mi13081217

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