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A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve a...

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Detalles Bibliográficos
Autores principales: Zhang, Han, Zhang, Chen, Chen, Jing, Li, Ang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415494/
https://www.ncbi.nlm.nih.gov/pubmed/36014175
http://dx.doi.org/10.3390/mi13081255