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A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies
The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve a...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415494/ https://www.ncbi.nlm.nih.gov/pubmed/36014175 http://dx.doi.org/10.3390/mi13081255 |