High-Quality Dry Etching of LiNbO(3) Assisted by Proton Substitution through H(2)-Plasma Surface Treatment

The exceptional material properties of Lithium Niobate (LiNbO(3)) make it an excellent material platform for a wide range of RF, MEMS, phononic and photonic applications; however, nano-micro scale device concepts require high fidelity processing of LN films. Here, we reported a highly optimized proc...

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Detalles Bibliográficos
Autores principales: Aryal, Arjun, Stricklin, Isaac, Behzadirad, Mahmoud, Branch, Darren W., Siddiqui, Aleem, Busani, Tito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415737/
https://www.ncbi.nlm.nih.gov/pubmed/36014702
http://dx.doi.org/10.3390/nano12162836

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415737/
https://www.ncbi.nlm.nih.gov/pubmed/36014702
http://dx.doi.org/10.3390/nano12162836

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