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On-Demand Metallization System Using Micro-Plasma Bubbles

3D wiring technology is required for the integration of micro–nano devices on various 3D surfaces. However, current wiring technologies cannot be adapted to a variety of materials and surfaces. Here, we propose a new metal deposition method using only a micro-plasma bubble injector and a metal ion s...

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Detalles Bibliográficos
Autores principales: Yamashita, Yu, Sakuma, Shinya, Yamanishi, Yoko
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415825/
https://www.ncbi.nlm.nih.gov/pubmed/36014235
http://dx.doi.org/10.3390/mi13081312