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On-Demand Metallization System Using Micro-Plasma Bubbles
3D wiring technology is required for the integration of micro–nano devices on various 3D surfaces. However, current wiring technologies cannot be adapted to a variety of materials and surfaces. Here, we propose a new metal deposition method using only a micro-plasma bubble injector and a metal ion s...
Autores principales: | Yamashita, Yu, Sakuma, Shinya, Yamanishi, Yoko |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415825/ https://www.ncbi.nlm.nih.gov/pubmed/36014235 http://dx.doi.org/10.3390/mi13081312 |
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