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Design and Fabrication of a Tunable Optofluidic Microlens Driven by an Encircled Thermo-Pneumatic Actuator
This paper presents the design, simulation, fabrication, assembly, and testing of a miniature thermo-pneumatic optofluidic lens. The device comprises two separate zones for air heating and fluid pressing on a flexible membrane. A buried three-dimensional spiral microchannel connects the two zones wi...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415834/ https://www.ncbi.nlm.nih.gov/pubmed/36014111 http://dx.doi.org/10.3390/mi13081189 |