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Design and Fabrication of a Tunable Optofluidic Microlens Driven by an Encircled Thermo-Pneumatic Actuator

This paper presents the design, simulation, fabrication, assembly, and testing of a miniature thermo-pneumatic optofluidic lens. The device comprises two separate zones for air heating and fluid pressing on a flexible membrane. A buried three-dimensional spiral microchannel connects the two zones wi...

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Detalles Bibliográficos
Autores principales:	Zhang, Wei, Li, Heng, Zou, Yongchao, Zhao, Pengpeng, Li, Zeren
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415834/ https://www.ncbi.nlm.nih.gov/pubmed/36014111 http://dx.doi.org/10.3390/mi13081189

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