Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique

This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a series of 54 thermocouples. The use of the temperature sens...

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Detalles Bibliográficos
Autores principales: Shen, Yi-Xuan, Tsai, Yao-Chuan, Lee, Chi-Yuan, Wu, Chyan-Chyi, Dai, Ching-Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415891/
https://www.ncbi.nlm.nih.gov/pubmed/36014180
http://dx.doi.org/10.3390/mi13081258

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415891/
https://www.ncbi.nlm.nih.gov/pubmed/36014180
http://dx.doi.org/10.3390/mi13081258

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