Cargando…

Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique

This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a series of 54 thermocouples. The use of the temperature sens...

Descripción completa

Detalles Bibliográficos
Autores principales:	Shen, Yi-Xuan, Tsai, Yao-Chuan, Lee, Chi-Yuan, Wu, Chyan-Chyi, Dai, Ching-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415891/ https://www.ncbi.nlm.nih.gov/pubmed/36014180 http://dx.doi.org/10.3390/mi13081258

Ejemplares similares

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
por: Fong, Chien-Fu, et al.
Publicado: (2015)

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique
por: Kao, Pin-Hsu, et al.
Publicado: (2009)

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique
por: Liu, Mao-Chen, et al.
Publicado: (2009)

Energy Harvesting Thermoelectric Generators Manufactured Using the Complementary Metal Oxide Semiconductor Process
por: Yang, Ming-Zhi, et al.
Publicado: (2013)

Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
por: Kao, Pin-Hsu, et al.
Publicado: (2010)

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique
por: Shen, Wei-Chun, et al.
Publicado: (2020)

Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process
por: Tseng, Jian-Zhi, et al.
Publicado: (2014)

Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process
por: Dai, Ching-Liang, et al.
Publicado: (2009)

Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
por: Yang, Ming-Zhi, et al.
Publicado: (2015)

Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques
por: Yang, Ming-Zhi, et al.
Publicado: (2011)

Manufacturing and Characterization of Three-Axis Magnetic Sensors Using the Standard 180 nm CMOS Technology
por: Wu, Chi-Han, et al.
Publicado: (2021)

Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
por: Cai, Chunhua, et al.
Publicado: (2018)

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors
por: Hsieh, Chen-Hsuan, et al.
Publicado: (2013)

Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors
por: Wang, Yucai, et al.
Publicado: (2015)

Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS–MEMS Technology
por: Göktaş, Hasan
Publicado: (2019)

Poly-SiGe for MEMS-above-CMOS sensors
por: Gonzalez Ruiz, Pilar, et al.
Publicado: (2014)

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor
por: Dennis, John-Ojur, et al.
Publicado: (2015)

Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process
por: Lin, Yen-Nan, et al.
Publicado: (2018)

A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging
por: Mendicino, Roberto, et al.
Publicado: (2023)

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications †
por: Mansoor, Mohtashim, et al.
Publicado: (2016)

Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide
por: Chen, Shu-Jung, et al.
Publicado: (2020)

Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process
por: Tsai, Zung-You, et al.
Publicado: (2021)

Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip
por: Dai, Ching-Liang, et al.
Publicado: (2010)

CMOS MEMS Fabrication Technologies and Devices
por: Qu, Hongwei
Publicado: (2016)

Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor
por: Dennis, John Ojur, et al.
Publicado: (2015)

A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
por: Huang, Jian-Qiu, et al.
Publicado: (2016)

Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS
por: Krayden, Adir, et al.
Publicado: (2023)

A 3D Model of the Thermoelectric Microwave Power Sensor by MEMS Technology
por: Yi, Zhenxiang, et al.
Publicado: (2016)

A Thermoelectric MEMS Microwave Power Sensor with Inline Self-Detection Function
por: Liu, Jiaqi, et al.
Publicado: (2022)

Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration †
por: Duque, Marcos, et al.
Publicado: (2019)

Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection
por: Maruyama, Satoshi, et al.
Publicado: (2018)

A CMOS MEMS-based Membrane-Bridge Nanomechanical Sensor for Small Molecule Detection
por: Yen, Yi-Kuang, et al.
Publicado: (2020)

Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone
por: Hopper, Richard, et al.
Publicado: (2022)

Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)
por: De Pasquale, Giorgio
Publicado: (2021)

Thermo-optical characterization of fluorescent rhodamine B based temperature-sensitive nanosensors using a CMOS MEMS micro-hotplate()
por: Chauhan, Veeren M., et al.
Publicado: (2014)

Battery-Less Environment Sensor Using Thermoelectric Energy Harvesting from Soil-Ambient Air Temperature Differences
por: Pappinisseri Puluckul, Priyesh, et al.
Publicado: (2022)

Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
por: Algamili, Abdullah S., et al.
Publicado: (2022)

Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip
por: Yang, Ming-Zhi, et al.
Publicado: (2014)

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach
por: Liu, Haotian, et al.
Publicado: (2018)

Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching
por: Mata-Hernandez, Diana, et al.
Publicado: (2020)

Cannot write session to /tmp/vufind_sessions/sess_3v76qses7m05kb6em6tqkj7tj4