Effects of Carbon Doping and DC Bias Voltage on Microstructure and Mechanical Properties of AlCrCN Films Synthesized via HiPIMS

This work compares the hardness and adhesion properties of AlCrN and AlCrCN hard coatings synthesized via HiPIMS using Al(70)Cr(30) and Cr targets. The hardness and adhesion properties of AlCrCN films were optimized by performing deposition under various C(2)H(2) flow rates (5, 8, 10, 13, 15, or 20...

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Detalles Bibliográficos
Autores principales: Tang, Jian-Fu, Wang, Shang-Hao, Yang, Fu-Chi, Chang, Chi-Lung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416242/
https://www.ncbi.nlm.nih.gov/pubmed/36013862
http://dx.doi.org/10.3390/ma15165729

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416242/
https://www.ncbi.nlm.nih.gov/pubmed/36013862
http://dx.doi.org/10.3390/ma15165729

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