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Effects of Carbon Doping and DC Bias Voltage on Microstructure and Mechanical Properties of AlCrCN Films Synthesized via HiPIMS
This work compares the hardness and adhesion properties of AlCrN and AlCrCN hard coatings synthesized via HiPIMS using Al(70)Cr(30) and Cr targets. The hardness and adhesion properties of AlCrCN films were optimized by performing deposition under various C(2)H(2) flow rates (5, 8, 10, 13, 15, or 20...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416242/ https://www.ncbi.nlm.nih.gov/pubmed/36013862 http://dx.doi.org/10.3390/ma15165729 |