Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass and the area facing the detection capacitor pl...

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Detalles Bibliográficos
Autores principales: Liu, Heng, Zhang, Yu, Wu, Jiale
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416272/
https://www.ncbi.nlm.nih.gov/pubmed/36014203
http://dx.doi.org/10.3390/mi13081281

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416272/
https://www.ncbi.nlm.nih.gov/pubmed/36014203
http://dx.doi.org/10.3390/mi13081281

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