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Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer
In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass and the area facing the detection capacitor pl...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416272/ https://www.ncbi.nlm.nih.gov/pubmed/36014203 http://dx.doi.org/10.3390/mi13081281 |