Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications

This study presents an experimental demonstration of the motion characteristics of a comb-drive actuator fabricated from heterogeneous structure and applied for cryogenic environments. Here, a silicon wafer is anodically bonded onto a glass substrate, which is considered to be a conventional heterog...

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Detalles Bibliográficos
Autores principales: Xue, Gaopeng, Toda, Masaya, Li, Xinghui, Li, Bing, Ono, Takahito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416771/
https://www.ncbi.nlm.nih.gov/pubmed/36014209
http://dx.doi.org/10.3390/mi13081287

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416771/
https://www.ncbi.nlm.nih.gov/pubmed/36014209
http://dx.doi.org/10.3390/mi13081287

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