Experimental determination of the lateral resolution of surface electric potential measurements by Kelvin probe force microscopy using biased electrodes separated by a nanoscale gap and application to thin-film transistors

A method is proposed to estimate the lateral resolution of surface potential profile measurements using Kelvin probe force microscopy (KPFM) on operating electronic devices. De-embedding the measured profile from the system response is required for various applications, such as contact characterizat...

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Detalles Bibliográficos
Autores principales: Brouillard, Mélanie, Bercu, Nicolas, Zschieschang, Ute, Simonetti, Olivier, Mittapalli, Rakesh, Klauk, Hagen, Giraudet, Louis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2022
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9417587/
https://www.ncbi.nlm.nih.gov/pubmed/36133418
http://dx.doi.org/10.1039/d1na00824b

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9417587/
https://www.ncbi.nlm.nih.gov/pubmed/36133418
http://dx.doi.org/10.1039/d1na00824b

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