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Top-down fabrication of ordered arrays of GaN nanowires by selective area sublimation
We demonstrate the top-down fabrication of ordered arrays of GaN nanowires by selective area sublimation of pre-patterned GaN(0001) layers grown by hydride vapor phase epitaxy on Al(2)O(3). Arrays with nanowire diameters and spacings ranging from 50 to 90 nm and 0.1 to 0.7 μm, respectively, are simu...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
RSC
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9417832/ https://www.ncbi.nlm.nih.gov/pubmed/36134215 http://dx.doi.org/10.1039/c8na00369f |