Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by in situ transmission electron microscopy

Mechanical resonators have wide applications in sensing bio-chemical substances, and provide an accurate method to measure the intrinsic elastic properties of oscillating materials. A high resonance order with high response frequency and a small resonator mass are critical for enhancing the sensitiv...

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Detalles Bibliográficos
Autores principales: Hsia, Feng-Chun, Tang, Dai-Ming, Jevasuwan, Wipakorn, Fukata, Naoki, Zhou, Xin, Mitome, Masanori, Bando, Yoshio, Nordling, Torbjörn E. M., Golberg, Dmitri
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2019
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9418527/
https://www.ncbi.nlm.nih.gov/pubmed/36134225
http://dx.doi.org/10.1039/c8na00373d

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9418527/
https://www.ncbi.nlm.nih.gov/pubmed/36134225
http://dx.doi.org/10.1039/c8na00373d

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