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Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by in situ transmission electron microscopy
Mechanical resonators have wide applications in sensing bio-chemical substances, and provide an accurate method to measure the intrinsic elastic properties of oscillating materials. A high resonance order with high response frequency and a small resonator mass are critical for enhancing the sensitiv...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
RSC
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9418527/ https://www.ncbi.nlm.nih.gov/pubmed/36134225 http://dx.doi.org/10.1039/c8na00373d |