Nano-LED induced chemical reactions for structuring processes

We present a structuring technique based on the initialization of chemical reactions by an array of nano-LEDs which is used in the near-field as well as in the far-field regime. In the near-field regime, we demonstrate first results with the nano-LED array for lithography using the photoresist Diazo...

Descripción completa

Detalles Bibliográficos
Autores principales: Mikulics, Martin, Sofer, Zdenĕk, Winden, Andreas, Trellenkamp, Stefan, Förster, Beate, Mayer, Joachim, Hardtdegen, Hilde Helen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2020
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9418560/
https://www.ncbi.nlm.nih.gov/pubmed/36132052
http://dx.doi.org/10.1039/d0na00851f

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9418560/
https://www.ncbi.nlm.nih.gov/pubmed/36132052
http://dx.doi.org/10.1039/d0na00851f

Ejemplares similares