Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography

In this paper, we demonstrate plasmonic color metasurfaces as large as ∼60 cm(2) fabricated by deep UV projection lithography employing an innovative combination of resolution enhancement techniques. Briefly, in addition to the established off-axis dipole illumination, double- and cross-exposure res...

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Detalles Bibliográficos
Autores principales: Keil, Matthias, Wetzel, Alexandre Emmanuel, Wu, Kaiyu, Khomtchenko, Elena, Urbankova, Jitka, Boisen, Anja, Rindzevicius, Tomas, Bunea, Ada-Ioana, Taboryski, Rafael J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2021
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9419299/
https://www.ncbi.nlm.nih.gov/pubmed/36133765
http://dx.doi.org/10.1039/d0na00934b

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9419299/
https://www.ncbi.nlm.nih.gov/pubmed/36133765
http://dx.doi.org/10.1039/d0na00934b

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