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Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography
In this paper, we demonstrate plasmonic color metasurfaces as large as ∼60 cm(2) fabricated by deep UV projection lithography employing an innovative combination of resolution enhancement techniques. Briefly, in addition to the established off-axis dipole illumination, double- and cross-exposure res...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
RSC
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9419299/ https://www.ncbi.nlm.nih.gov/pubmed/36133765 http://dx.doi.org/10.1039/d0na00934b |