Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

This paper reports a type of highly sensitive temperature sensor utilizing AlN-on-Si resonators with coupled-beam structures of double- and triple-ended-tuning-fork (D/TETF). For both resonators, the out-of-plane flexural mode is adopted as it favors the effect of thermal mismatch between the compos...

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Detalles Bibliográficos
Autores principales: Tu, Cheng, Yang, Ming-hong, Zhang, Zi-qiang, Lv, Xiu-mei, Li, Lei, Zhang, Xiao-Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: AAAS 2022
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9429980/
https://www.ncbi.nlm.nih.gov/pubmed/36082211
http://dx.doi.org/10.34133/2022/9865926

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9429980/
https://www.ncbi.nlm.nih.gov/pubmed/36082211
http://dx.doi.org/10.34133/2022/9865926

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