Super-resolution laser probing of integrated circuits using algorithmic methods

Laser probing remains invaluable to the semiconductor industry for isolating and diagnosing defects in silicon transistors in integrated circuits during electrical stress tests. However, continuous device miniaturization below the 20 nm technology node has crammed multiple transistors within the foc...

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Detalles Bibliográficos
Autores principales: Ravikumar, V. K., Chin, Jiann Min, Lua, Winson, Linarto, Nathan, Ranganathan, Gopinath, Trisno, Jonathan, Pey, K. L., Yang, Joel K. W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9440222/
https://www.ncbi.nlm.nih.gov/pubmed/36055983
http://dx.doi.org/10.1038/s41467-022-32724-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9440222/
https://www.ncbi.nlm.nih.gov/pubmed/36055983
http://dx.doi.org/10.1038/s41467-022-32724-z

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