High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing

We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the can...

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Detalles Bibliográficos
Autores principales: Wu, Guojie, Gong, Zhenfeng, Ma, Junsheng, Li, Haie, Guo, Min, Chen, Ke, Peng, Wei, Yu, Qingxu, Mei, Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2022
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9441259/
https://www.ncbi.nlm.nih.gov/pubmed/36068800
http://dx.doi.org/10.1016/j.pacs.2022.100386

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9441259/
https://www.ncbi.nlm.nih.gov/pubmed/36068800
http://dx.doi.org/10.1016/j.pacs.2022.100386

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